Summary of 'The Effects of Ion Species and Target Temperature on Topography Development on Ion Bombarded Si'
SumID: Carter1995 - Shortlink: http://www.papercore.org/Carter1995
Last update: 2010-08-25 13:04:54 UTC
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Summary contributors: E. O. Yewande, Christoph Heinisch
Summarized paper: The Effects of Ion Species and Target Temperature on Topography Development on Ion Bombarded Si
Paper authors: G. Carter, V. Vishnyakov, Yu. V. Martynenko, M. J. Nobes
Paper link: http://link.aip.org/link/?JAPIAU/78/3559/1
Pages: 7
Compression factor: 1:7 (approximately) (959 words in summary)